CANEUS Moments

Defense and Policy
(Def1)Defense / Policy
Policy (p1)

Plicy (p2)

Defense / Policy (Def1)

Session chair: Jean-Claude Piedboeuf, CSA, Canada


Gaëtan Menozzi, NEXUS, France
MEMS in FRANCE, An overview of trends and products for Aeronautic & Defence applications

The Author is involved in different organizations and projects dealing with MEMS in Europe and in France, from civil to military applications. This paper gives an overview of the French MEMS expertise from R&D to products within the European context.

In the civil domain, the author is currently Chairman of NEXUS, the European network of Microsystems, and chairman of EURIMUS a strategic Eurèka 5 years program. This gives an European overview of civilian expertise in MEMS products which could be used as COTS for military applications. The USCS User-Supplier-Clubs, the core of the NEXUS activities, represent an excellent forum place for exchanging on dedicated MEMS domains. The USC Aerospace and Geophysics, addresses the Road map for aeronautic and defense applications,..

In the military field, the author has been working for a long time in sensors and µsensors/MEMS for aeronautics and defense applications. In this stage, he has been launched and participated in European Euclid project such as BRAMMS project involving UK, Italy, Netherlands and France. This project was aimed at defining the needs in miniaturization for air sea and land applications, and the capabilities of current MEMS or future developments. New projects in RF MEMS have been launched for military objectives.

Based on the previous experience, the author has been asked to chair during the year 2001 a MEMS Task Force for the French Ministry of Defense in order to define:
The main area where MEMS demonstrate high potential with new military products issued from their application,
Establish Road maps for the different systems domain such as navigation and radio navigation, RF communications for Radar and countermeasures, UAVs & µUAVs, biochemical, otpronics..
Deliver a status of French expertise and benchmark the European and overseas capabilities in MEMS R&D and production,

  • Analyze the possible cooperation from dual applications field,
  • Analyze the menaces around this new technology.

As a result of this task force this paper will present some basic road map, tables of expertise in MEMS sensors for navigation such as accelerometers, gyrometers, pressure sensors for Air Data Computer and Engines. Examples from major defense companies are shown. New developments in RF MEMS are being described with an emphasis on dual technology applications from mobile phone towards active antennas.

France and European key players are listed. Major programs of R&D from civil to military applications are addressed.

Lerwen Liu, nAbacus, Japan
Nanotechnology Global Policies.and APEC Collaboration Strategies

Nanotechnology is a global technology and the Asia Pacific (AP) is
advancing to the most ambitious and dynamic region in the world. Dr Lerwen Liu
will provide the latest update on the Nanotechnology government programs and
industry policy in the Asia Pacific region including Australia, China, Hong Kong, Korea, Japan, Singapore and Taiwan. The corporate and venture capital investment interests in this region will also be outlined. Highlights in the Nanotechnology developments in the region including Bionanotechnology, Nanoelectronics and Nanomaterials will be presented. The total public spending in the Asia Pacific region exceeds US$1b for
2002 and more will be spent for the coming years. This indicates the commitment
from the governments in AP region to take a significant role in the global
Nanotechnology development, and the appreciation of the importance of Nanotechnology R & D and its impact in industries and businesses in the region. Unlike the European Union, the AP region has no government or an organization to coordinate the regional Nanotechnology policy, education, network, industry and business development. There is an increasing awareness of the necessity of building strong alliance across in the AP region in Nanotechnology R & D and commercialization. Dr Liu will also present
the mission of the Asia Pacific Nanotechnology Forum (APNF).

Policy (P1)

Session chair: Morrel P. Bachynski, MPB Technologies, Canada


Raffaella Borzi, IMEC, USA
Micro-NanoTechonology Collaboration Strategies for Businesses and Governments, between Europe, USA and Other Countries

convergence of computing, communications and application technology requires chips with higher bandwidth, increased functionality and lower power consumption.
The market pressures the industry to develop new products faster and at lower costs. The needed technological evolution asks for faster research advances and developments. This scenario forces companies to invest more in R&D and to perform further development with competitors, allies and research institutes, minimizing risks and costs while increasing knowledge.
These trends require the development of a dynamical business collaborative model.
IMEC as leading research institute and center of excellence for microelectronics, nanotechnology and ICT technologies, is addressing these challenges. IMEC's collaborative R&D model is based on a program-driven approach finally tuned to the needs of each partner. The programs, regulated by an appropriate Intellectual Property Rights policy (IPR), enable sharing of risks, and costs while increasing knowledge.
The success of this model is shown by the collaboration already established with more than 450 partners and the development of next-generation technologies.

David M. Klymyshyn, Venkat R. Subramanian, University of Saskatchewan, Canada
MEMs/Nanotech Facility at the Canadian Light Source Synchrotron

This paper discusses the fabrication aspects of a sensor device that is based on a sputter deposited multilayer giant magnetoresistive (GMR) sensor. The device consists of a micromachined microstructure (membrane), a GMR sensor, and a hard magnetic film sputtered onto the membrane. The GMR sensor detects the membrane acceleration by sensing the changes in magnetic field caused by the displacement of the hard magnetic film on the microstructure. Very thin (0.5 µm) silicon nitride membranes are fabricated by means of anisotropic bulk micromachining of silicon wafer. A reliable GMR-MEMS device must have characteristics such as a high percentage change in resistance, a high field resistance, a low resistance noise, and a large bandwidth. These characteristics strongly depend on the thickness of the various layers in sensor device multilayers, the composition and microstructure of the individual layers. Deposition and patterning of hard magnetic film over the microstructure and the bonding of this microstructure over the GMR element are also discussed. The fabrication and reliability issues associated with GMR-MEMS devices have been discussed.

Laurent Marchand, ESA, France
MNT programs and Strategies within the ESA

Policy (P2)

Session chair: Peter Stibrany, MD Robotics, Canada


David Assemat, CNES, France
MEMS and Microtechnology Microtechnology for Space Applications : CNES Policies and Strategies

The main activities and studies undertaken was presented. These points were covering the following areas :

  • AOCS subsystem (System Engineering and micro sensors),
  • RF subsystem (Switches, filter…),
  • Propulsion subsystem,
  • Thermal regulation (micro heat pipe),
  • Basic technologies development,
  • Reliability.

Thomas George, JPL-NASA, US
Policies and Needs for Potential Governmental Agreements for Free flow of Aerospace Based MNT Between Member State Organizations

The MEMS Technology Group at JPL pursues the development of a wide range of technologies that are primarily applicable to NASA needs in the area of robotic planetary exploration. MEMS technologies are uniquely suited for space applications since they offer the advantages of low mass, low power consumption and reliability, without significant loss of capability. These attributes will not only enable the micro-spacecraft of the future but also provide low-mass devices with high redundancy for conventional spacecraft. The MEMS-based technologies being developed include Micro-Gyroscope devices, Micro-Propulsion (Solid, Liquid and Gaseous propellant) devices, Micro-Valves, LIGA-based micro-devices, sensors and devices for System-on-a-chip applications and Micro-Instruments. End-to-end prototype development of these technologies is conducted at the Microdevices Laboratory, a 38,000 sq. ft. facility with over 5000 sq. ft of cleanrooms (class 10 - 100,000) and over 5000 sq. ft. of characterization laboratory space. The facilities include computer design and simulation tools, optical and electron-beam lithography, dry and wet etching facilities including deep reactive ion etching, metallization, assembly and device testing facilities. Following the fabrication and assembly of the device prototypes, reliability testing of these devices is conducted to determine failure modes. The need for low-cost, rapid space testing of these prototypes and a possible solution via the use of "PICO-Sats" will also be discussed
Michael Huff, MEMS Exchange, USA

Michael Huff, MEMS Exchange, USA
MEMS Exchange Collaboration Program

Last update - Dec. 11, 2002