Muthukumaran Packirisamy
PRESENTATION: Fabrication Techniques: Technical Challenges and Applications
The presentation will cover the introduction to MEMS processes and the technical challenges associated with each process. It will include different types of micromachining processes such as bulk micromachining and surface micromachining and also the problems associated with them. Different types of bonding techniques, deposition process, photolithography and LIGA process will also be included in this presentation. This presentation will cover the adaptation of CMOS process for making MEMS devices, with examples. The fabrication for making high aspect ratio structures suitable for aerospace application will also be covered. The presentation will also show the turbine wheel fabricated through surface micromachining. Introduction to fabrication synthesis of microsystems and its influence on the device performance will also be covered. The presentation will also include a simple approach to incorporate the effect of boundary conditions that are inherent to the fabrication techniques
